INFICON IC/5 Thin Film Deposition Controller - Manual (Page 233)

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IC/5 Operating Manual
Chapter 11
Installation and Interfaces
11.1 Location Guidelines
Before you permanently install this controller, we recommend that you read this
entire section on Installation and Interfaces and follow its recommendations as
closely as possible. INFICON has taken numerous steps to ensure its equipment
will operate in a variety of harsh situations. Failure to adhere to these simple
practices may adversely affect the performance and longevity of this controller, or
controllers made by any manufacturer.
11.1.1 Sensor Types
The choice of sensor type must be dictated by the Process, the deposition material
and the physical characteristics of the process chamber. General guidelines for
each sensor type produced by INFICON are outlined in the Sensor Selection table,
Table 11-1 . For specific recommendations, consult your INFICON representative.