2 utility navigation, 3 utility parameters – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
9.2 Utility Navigation
Select a parameter for entry by positioning the box cursor at the desired value
following the parameter description. New values are input from the front panel
followed by pressing the Enter key. Values are cleared by pressing the Clear key.
Figure 9-3 Utility Display (Page 2)
9.3 Utility Parameters
ACTIVE PROCESS . . . . . . . . . . . . . 1 to 50
This parameter selects which sequence of Layers, as defined in Process
Set-Up, is to be executed. Values are 1 to 50. The default value is 1. This
parameter cannot be changed while executing a process.
RUN NUMBER. . . . . . . . . . . . . . . . . 1 to 999
This is a counter which increments by one at each start of a Process. Any
arbitrary value may be entered as a starting point. Values range from 1 to 999.
The default value is 1.
Table 9-1 Function Key Selection Choices for Utility Parameters
Key
Function
Description
F1
PAGE FORWARD
Select this key to access the second page of
parameters.
F2
PAGE BACK
Select this key to return to the first page of
parameters.
F6
PROGRAM
Select this key to return to the PROGRAM
display.