INFICON IC/5 Thin Film Deposition Controller - Manual (Page 274)

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IC/5 Operating Manual
UNABLE TO AUTO Z #
Indicates the requested Auto Z measurement cannot be completed due to the
crystal condition. This is caused by a weak or unstable first anharmonic
measurement. This also may be caused by the instrument not recognizing the
crystal as a new crystal, or inserting a used crystal.
UNABLE TO START
A START command cannot be processed while the display is on the I/O
screens.
XTAL CANNOT EQUAL 0
A value in the XL Position parameter cannot be zero. For example, the
sequence 135 is valid. The sequence 105 is not valid.
XTAL FAIL IN CAL
A crystal fail has occurred during automatic cross talk calibration.
XTAL FAIL #
Indicates the crystal at Sensor # is failed.
XTAL GREATER THAN 6
A value in the XL Position parameter cannot be greater than six. For example,
the sequence 246 is valid. The sequence 247 is not valid.
XTAL SWITCHING
Indicates a crystal switch is in progress.