INFICON IC/5 Thin Film Deposition Controller - Manual (Page 288)

13 - 24
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
Figure 13-1 Standard Crystal Sensor (Exploded)
13.3.2 Shuttered and Dual Sensors
There is no difference in the crystal replacement procedure between shuttered and
non-shuttered Standard and Compact sensors, since the shutter pivots away from
the crystal opening when the shutter is in the relaxed state.