INFICON IC/5 Thin Film Deposition Controller - Manual (Page 164)

7 - 22
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
7.7.4.3 Update Utility Parameters
For each command format the symbol
þ
represents a blank space.
The format is:
UU
þ
param#
þ
value
This command changes the value of a utility parameter. The parameters marked
with a * cannot be updated. Refer to
Chapter 9, Utility Set-Up for parameter value
ranges. Non-numeric values are upper or lower case YES or NO.
Table 7-14 Update Utility Parameters
param# Utility Parameter
0 Active Process
1 Run Number
2 Layer To Start
3 Stop on Max.Power
4 Aggregate Multiplier
5 Analog Display
6 Analog Scan Rate
7 Test On
8 Time Compressed
9 Program Lock Code*
10 Sensor-I/O Lock Code*
11 Floppy Disk Access Code*
12 System Time
13 System Date
14 Audio Feedback
15 Co-Deposition Display
16 Rate Smoothing