INFICON IC/5 Thin Film Deposition Controller - Manual (Page 130)

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IC/5 Operating Manual
RISE 2
Sets the logic condition to be true at the start of Rise Time 2. The condition
remains true until the end of Rise Time 2. The condition is also cleared when
entering the Manual state, when a STOP/RESET or a STOP/START sequence
is executed.
SENSOR #
Sets the logic condition to be true whenever a Layer containing the Sensor # is
in the READY state, or when it is STARTed. The condition remains true until a
Layer containing a Material that does not use this Sensor # is STARTed or
placed in the READY state, or until a Crystal Switch on a dual sensor head is
done. Numeric inputs range from 1 through 8.
SHUTTER DELAY
Sets the logic condition to be true at the start of Shutter Delay. The condition
remains true until the end of Shutter Delay. The condition is also cleared when
entering the Manual state, when a STOP/RESET or a STOP/START sequence
is executed.
SHUTTER ERROR
Sets the logic condition to be true when a Shutter Delay Error condition occurs.
The condition remains true until a START or a RESET command is received.
SOAK 1
Sets the logic condition to be true at the start of Soak Time 1. The condition
remains true until the end of Soak Time 1. The condition is also cleared when
entering the Manual state, when a STOP/RESET or a STOP/START sequence
is executed. Note: This state and RISE 1 are skipped if the same material was
used in a previous layer and has a non-zero Idle power. The next layer using
this material will immediately proceed to the Rise 2 state.
SOAK 2
Sets the logic condition to be true at the start of Soak Time 2. The condition
remains true until the end of Soak Time 2. The condition is also cleared when
entering the Manual state, when a STOP/RESET or a STOP/START sequence
is executed.
SOURCE #
Sets the logic condition to be true whenever a Layer containing Source # is in
the READY state, or when it is STARTed. The condition remains true until a
Layer containing a Material with a different Source # is STARTed or placed in
the READY state.