INFICON IC/5 Thin Film Deposition Controller - Manual (Page 211)

10 - 5
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
10.2.1 Instrument Parameters Associated with the Trend Analysis Feature
SOURCE DAC OUTPUT
This parameter designates which of the DAC outputs is to be used as a source
output. Values range from 0 to 6, with 0 indicating there is not a DAC identified
with this particular source. Values 1 through 6 correspond to the 6 DAC outputs
on the back of the instrument. (Refer to
section 8.3 on page 8-3 .)
RECORDER OUTPUT (sensor or aggregate)
This parameter designates which of the DAC outputs is to be used as a Sensor
recorder output. (Refer to
section 8.4 on page 8-6 .) There is also a parameter
to designate which of the DAC outputs is to be used as a recorder output for
Aggregate Rate. (Refer to
section 4.3 on page 4-5 )
NOTE: A recorder output cannot be associated with a DAC that is configured
as a Source output. An error message will be displayed if this is
attempted.
RECORDER FUNCTION (sensor or aggregate)
This parameter determines the function of the sensor recorder output between
Sensor Rate, Thickness or Rate Deviation. (Refer to
section 8.4 on page 8-6 .)
There is also a parameter to determine the function of the aggregate recorder
output. (Refer to
section 4.3 on page 4-5 .)
10.3 Use as a System Controller Example
Refer to Chapter 6 of this manual for more detailed information on the IC/5 I/O
functions.
CAUTION
The following actions are all level outputs and will remain
active until turned off. This is true even if the logic string
is cleared. For example, the action External Output ON 1
will activate relay number 1. Relay number I will remain
active until an External Output OFF 1 action is executed:
CRYSTAL FAIL INHIBIT (ON/OFF)
RW HOLD (ON/OFF)
RW HOLD INHIBIT (ON/OFF)
SOAK HOLD 1 (ON/OFF)
SOAK HOLD 2 (ON/OFF)
NON-DEPOSIT CLOCK HOLD (ON/OFF)
EXTERNAL OUTPUT (ON/OFF)
MESSAGE (ON/OFF) ##