INFICON IC/5 Thin Film Deposition Controller - Manual (Page 87)

3 - 35
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
3 Select the Crucible Output Type as normally open (NO), or normally closed
(NC).
Example:
Number of crucibles = 4
Crucible output = 6
Crucible output type = NO
For this example, wiring to the controller is based on Table 3-4 . Only relays 6
and 7 are needed to encode the four possible positions.
NOTE: If the crucible output type were normally closed (NC), Table 3-4 would
need to be modified by exchanging open and closed.
4 Determine whether Turret Feedback is desired. This allows the turret position
controller to stop further instrument processing until the requested turret
position is satisfied. If chosen, a turret input must be connected to the turret
position controller’s feedback signal.
If Turret Feedback is not chosen, program a Turret Delay Time which allows an
adequate time for positioning to take place. Once the delay time has expired,
instrument state processing continues.
5 The selection of a particular crucible for a layer is defined in the process
directory.
6 Select the process to modify.
7 Program the particular “Crucible Number” for each layer.
Example:
Layer 1: Crucible Number = 1
Layer 2: Crucible Number = 2
Layer 4: Crucible Number = 4
Table 3-4 Wiring To The Controller
Crucible
Position
Contact Status
Relay #6 Relay #7
1 Open Open
2 Closed Open
3 Open Closed
4 Closed Closed