INFICON IC/5 Thin Film Deposition Controller - Manual (Page 84)

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IC/5 Operating Manual
3.6 Special Features
The IC/5 has several special features to enhance the performance of the
instrument.
3.6.1 Crystal Switching
The IC/5 offers a choice of single, dual, CrystalSix or rotary sensors. The dual or
CrystalSix sensor provides a backup monitor crystal in case a crystal fails during
deposition. To configure sensors, see
Chapter 8 .
A crystal switch will automatically occur when:
 The instrument is configured for a dual head, a layer is running on the primary
sensor, and the primary crystal fails. The primary sensor is the sensor (of the
dual sensor) which has its option set to non-zero.
 The instrument is configured for a CrystalSix, a layer is running, and there is at
least one good crystal from the crystal position list (see
Chapter 4 ) left in the
carousel when the active crystal fails.
 The instrument is configured for a rotary sensor, a layer is running, and there is
at least one good crystal in the rotary sensor.
 The instrument is configured for a dual head or single heads, a START is
executed and the designated primary sensor is different from the last sensor
run.
 Using a CrystalSix and pressing START, if the current CrystalSix position is not
the position listed first on the material display.
A crystal switch will NOT automatically occur:
 During a state of STOP, READY or IDLE.
 When the designated primary sensor has already failed at the START of a
layer. (A STOP will occur.)
 During deposition if the secondary crystal of a dual head fails, or the last good
crystal of a CrystalSix fails. (In either case a TIME-POWER or STOP will occur,
depending on the sensor option chosen.)
A crystal switch can be manually executed via the front panel, hand-held controller,
remote communications, or logic statements when the system is configured for
dual, CrystalSix, or rotary sensors.
NOTE: When crystal switching with the hand-held controller, the IC/5 must be on
the SENSORS display.
NOTE: The active sensor of a dual sensor head is shown as ON in the SENSORS
display.