INFICON IC/5 Thin Film Deposition Controller - Manual (Page 267)

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IC/5 Operating Manual
EDIT IN PROGRESS
The I/O Map or the User Messages displays cannot be exited while an edit
name or edit message operation is occurring.
END OF PROCESS
The Process is completed when the last layer in the Process reaches the IDLE
state.
FAST SYSTEM
AutoTune has detected the response of the system to be “fast”.
FILE CHECKSUM ERROR
Indicates the instrument configuration file being retrieved from the floppy disk
is corrupt and does not pass the checksum verification. The instrument
parameters remain unchanged from prior to the retrieve operation.
FILE FORMAT ERROR
Indicates the file being retrieved from the floppy disk is not in the proper
instrument configuration file format. The instrument parameters remain
unchanged from prior to the retrieve operation.
FILE IS READ ONLY
A save operation cannot be performed on a file marked as read only.
FILE RANGE ERROR
This error message indicates the configuration file contains a value which
exceeds the allowed range for a particular parameter. This may occur if
transferring files between two different versions of instrument software and
one of the software versions has a different acceptable range of values for a
given parameter.
FILE READ ERROR
The retrieve operation could not be completed due to an error reading the
floppy disk. The instrument parameters remain unchanged from prior to the
retrieve operation.
HALF RATE
The system is being “bumped” toward half of the desired deposition rate while
in AutoTune.
HOLD
The process is in the Hold portion of RateWatcher.
IEEE488 TIMEOUT
Data in the instrument parallel communications port buffer must be read by the
Host computer within a given amount of time. If this does not happen the
instrument will clear its communications buffer. This error message indicates
the Host computer has quit communicating with the instrument.
ILLEGAL BAUD RATE
Baud rate selections are 2400, 4800, 9600, or 19200.