INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
7
When AutoTune is completed the instrument will automatically return to the
AutoTune Parameters display and the newly calculated values will be displayed
next to the old values. The user then has the option of ACCEPTING CHANGES
(F5) or REFUSING CHANGES (F6). Accepting the changes replaces the old
parameters with the new values, while refusing the changes leaves the old
values in place.
8
An AUTOTUNE failure means the IC/5 was unable to consistently measure the
system's response characteristics.
NOTE: To ensure a successful AutoTune, there are a few items to be
considered:
A well-conditioned source is imperative. Be certain the source will be
able to withstand the automatic power increments without spitting or
other damage occurring to the system.
A "quiet" crystal is essential. Rate noise and gun arcs will cause
AutoTune Failures.
Use the Maximum Rate and Maximum Power limits to protect your
equipment.
Do not set the Maximum Rate at exactly twice the Desired Rate. Allow
for overshoot.