INFICON IC/5 Thin Film Deposition Controller - Manual (Page 104)

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IC/5 Operating Manual
Figure 4-7 Source Power Level Profile
MAXIMUM POWER . . . . . . . . . . . . . 0.0 to 99.9%
This parameter is used to set the maximum permissible % power level. The
control voltage output will not exceed this limit. Values range from 0.0 to 99.9%.
The default value is 90%.
Power Ramps (Pre deposit states)
The next six parameters—Soak Power 1, Rise Time 1, Soak Time 1, and Soak
Power 2, Rise Time 2 and Soak Time 2—are used to define two power ramps
provided to precondition materials.
NOTE: The first power ramp consisting of Rise 1 and Soak 1 is skipped if the
previous layer had the same source, same crucible and its idle power is
nonzero.
SOAK POWER 1 . . . . . . . . . . . . . . . 0.0 to 99.9%
This parameter is usually set to the power level at which the source material
just begins to melt. The instrument ramps the power level from zero to Soak
Power 1 linearly over the time period Rise Time 1. Values range from 0.0 to
99.9%. The default value is 0.
RISE TIME 1 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
This parameter provides the time period over which the source power is
ramped from 0 to Soak Power 1. Values range from 00:00 to 99:59
minutes:seconds. The default values is 00:00.
SOAK TIME 1 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
This parameter provides the time period for which the instrument holds at Soak
Power 1. Values range from 00:00 to 99:59 minutes. The default value is 00:00.