INFICON IC/5 Thin Film Deposition Controller - Manual (Page 227)

10 - 21
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
Figure 10-27 Statement 23
This Statement monitors the Alarm Answered input. Once the Abort input is
activated, the Alarm Answered and Evacuate Chamber inputs must both be
triggered in order for automatic processing of the pump down cycle and deposition
process to continue. This is done by setting Timer 8 and having Statements 7 and
8 dependent on Timer 8. The Deposition process may be interrupted without
disturbing the pump down cycle by pressing the STOP key on the IC/5 front panel.
Statement 35 sets Timer 14 to indicate a STOP command has been initiated from
the IC/5 front panel. Timer 14 is also used to prevent Statements 30 and 31, which
turn on the electron beam gun high voltage and filament voltage, from being
evaluated true after the STOP command.
NOTE: Statements 24 through 29 are used to turn the user messages on and off
at various stages of the pump down cycle.
Figure 10-28 Statement 24
This statement turns on the START PUMP CYCLE message and turns off the
CHAMBER -VENTED message. The dependence on Timer 14 is so that the
message is not displayed a second time if a STOP/START sequence is given
through the IC/5. The dependence on Timer 1 ensures the message is displayed
only when the system is set for automatic process control.
Figure 10-29 Statement 25
Statement 12 opens the High Vacuum Valve. The START PUMP CYCLE message
is turned off and the UNDER HIGH VACUUM message is turned on.
Figure 10-30 Statement 26
This Statement cancels the UNDER HIGH VACUUM message whenever the high
vacuum valve is closed.