1 outputs connected to i/o board 1 – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
5
This input monitors whether the Roughing Valve is closed.
6
This input monitors whether the High Vacuum Valve is closed.
7
An input to monitor the Cross Over Pressure relay from the Gauge.
8
An input to monitor the Gauges' Status relays. This indicates if the gauges are
operating properly.
10.3.2.1 Outputs Connected to I/O Board 1
1
The Board 1 Relay is wired in series with the Board 2 Relay. These relays are
programmed to be Normally Closed; all other relays are programmed to be
Normally Open. Both of these relays are in turn wired in series with the
Connectors input on Board 2. This combination of relays and an input monitor
the hardware connections to the I/O boards. This ensures the connectors are
attached to the IC/5 in order for the logic processing to proceed.
2
The Foreline Valve relay controls opening and closing of the Foreline Valve.
3
The High Vacuum Valve relay controls opening and closing of the High Vacuum
Valve.
4
The Roughing Valve relay controls opening and closing of the Roughing Valve.
5
The Electron Beam Gun High Voltage relay is one of two relays required to
remotely turn the electron beam gun high voltage on.
6
The Electron Beam Gun High Voltage Interlock relay is the second of two relays
required to remotely turn the electron beam gun high voltage on.
7
The Electron Beam Gun Filament relay is one of two relays required to remotely
turn on the electron beam gun filament voltage.
8
The Electron Beam Gun Filament Interlock relay is the second of two relays
required to remotely turn the electron beam gun filament voltage on.
Figure 10-5 I/O Map Board 2