INFICON IC/5 Thin Film Deposition Controller - Manual (Page 131)

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IC/5 Operating Manual
SOURCE SWITCH
Sets the logic condition to be true at the beginning of the Source Switch state.
The condition remains true until the end of the Source Switch state. The
condition is also cleared when a STOP/RESET or a STOP/START sequence is
executed.
STATEMENT #
This Event can be used to test a logic statement transition and the appropriate
Action is taken when the statement designated becomes “true.” A “true”
statement is indicated by three small asterisks below the statement number.
STOP
Sets the logic condition to be true as long as the instrument is in STOP. The
condition remains true until a RESET or a START command is received.
TEST
Sets the condition to be true when the IC/5 is in TEST.
THICK LIMIT
Sets the logic condition to be true once the Thickness Limit is achieved. The
condition remains true until entering the IDLE state for that Layer or until a
STOP/RESET sequence is executed.
TIME LIMIT
Sets the logic condition to be true once the Time Limit is achieved. The
condition remains true until the Layer which has achieved Time Limit enters the
IDLE state or until a STOP/RESET sequence is executed.
TIME POWER
Sets the logic condition to be true upon entering a Time Power state. The
condition remains true until the end of the DEPOSIT state.
TIMER ACTIVE ###
Indicates the Timer number designated has been set and not cancelled. An
expired timer will remain active until canceled.
TIMER EXPIRED #
Indicates the timer number designated has been set and the time expired. An
expired timer remains in the TIMER EXPIRED state until it is cancelled with the
CANCEL TIMER # action.
XTAL FAIL #
Sets the logic condition to be true as long as there is a Crystal Fail without
having a Crystal Switch for the designated sensor. The logic condition remains
false if the XTAL FAIL INHIBIT Action is active. The condition remains true until
a working crystal is input to the appropriate sensor.