INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
CRUCIBLE. . . . . . . . . . . . . . . . . . . . 1 to 64 (max)
This value is used in conjunction with the Number of Crucibles selected in
Source Set-Up (
). The integer value entered here sets the state of
the Crucible relays. Values range from 1 to the number of Crucibles chosen, up
to a maximum of 64. The default value is 1. This parameter is set to 1 if the
Crucible function is not chosen in configuring the Source/Sensors.
RATE RAMP 1
Rate Ramp 1 is provided to effect an aggregate rate change while depositing a
Layer. The aggregate rate is ramped linearly from the original rate setpoint to
the New Rate 1 value over the time interval Ramp Time 1. It is allowed to ramp
to a higher or a lower rate. See
for the Rate Ramp
trigger of Final Thickness feature.
NEW RATE 1 . . . . . . . . . . . . . . . . . . 0.0 to 999 Å/sec from front panel, 0.00 to 999
Å/sec via communications
This value sets the newly desired aggregate rate. Values range from 0.00 to
999 Å/sec. The default value is 0.0.
START RAMP 1 . . . . . . . . . . . . . . . . 0.000 to 999.9 kÅ
This value sets the thickness at which to start the Rate Ramp. Values range
from 0.000 to 999.9 kÅ. This thickness value must be less than or equal to the
Start Ramp 2 thickness value if the value of Start Ramp 2 is non-zero. A value
of zero disables the feature.
RAMP TIME 1 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
This value determines the time period over which to ramp the rate from the
original rate to New Rate 1. Values range from 00:00 to 99:59 minutes:seconds.
The default value is 00:00.
RATE RAMP 2
Rate Ramp 2 is provided to effect a second change in aggregate rate during
the deposition of a Layer. The rate is ramped linearly from New Rate 1 to New
Rate 2 over the time interval Ramp Time 2. It is allowed to ramp to a higher or
lower rate.
NEW RATE 2 . . . . . . . . . . . . . . . . . . 0.0 to 999 Å/sec from front panel, 0.00 to 999
Å/sec via communications
This value sets the newly desired aggregate rate. Values range from 0.00 to
999 Å/second. The default is 0.0.