INFICON IC/5 Thin Film Deposition Controller - Manual (Page 294)

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IC/5 Operating Manual
13.4.1.2 Feed-Through Or In-Vacuum Cable
Diagnostic Procedure
1 Refer to Figure 13-6 on page 13-28 . Remove the In-Vacuum cable from the
Sensor Head at point B.
2 Connect the Crystal Sensor Emulator to the In-Vacuum cable.
 If the XTAL Fail message disappears after approximately five seconds, the
Feed-Through and In-Vacuum Cable are working properly. Re-install the
In-Vacuum cable to the Sensor Head. Go to section
section 13.4.1.3 on
page 13-31 .
 If the XTAL Fail message remains, continue at step 3.
3 Disconnect the In-Vacuum cable from the Feed-Through and the Emulator.
Disconnect the six-inch BNC cable from the Feed-Through.
4 Using an Ohm Meter, verify electrical continuity from the BNC center pin on the
Feed-Through to the Microdot center pin on the Feed-Through. A typical value
would be less than 0.2 ohms.
5 Verify electrical isolation of the center pin on the Feed-Through from the
electrical ground (Feed-Through body). A typical value would be in excess of
10 megohms.
If the Feed-Through is found to be defective, replace the Feed-Through, re-attach
the BNC and In-Vacuum cables, and repeat this procedure starting at Step 2,
otherwise continue at step 6.
6 Verify electrical continuity from center pin to center pin on the In-Vacuum cable.
7 Verify that the center pin of the In-Vacuum cable is electrically isolated from the
In-Vacuum cable shield.
If the In-Vacuum cable is found to be defective, replace the In-Vacuum cable.
Re-attach the BNC and In-Vacuum cables, and repeat this procedure starting at
Step 2, otherwise continue at step 8.
8 Connect the In-Vacuum Cable to the Feed-Through.
9 Verify electrical continuity from the center pin on the BNC connector of the
Feed-Through to the center pin on the un-terminated end of the In-Vacuum
cable.
10 Verify electrical isolation from the center pin to electrical ground (Feed-Through
body).
If the Feed-Through/In-Vacuum cable system is found to be defective, look for
defective electrical contacts at the Feed-Through to In-Vacuum cable connection.
Repair or replace the Feed-Through as necessary. Re-attach the BNC and
In-Vacuum cables and repeat this procedure starting at step 2. Otherwise, continue
at step 11.