INFICON IC/5 Thin Film Deposition Controller - Manual (Page 209)

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IC/5 Operating Manual
If a sensor fails during deposition, a sudden change in the aggregate rate may
occur due to this sensor's rate information being lost. An aggregate multiplier
is calculated to correct for this sudden change. The aggregate multiplier is
based on the last 2.5 seconds of the deposition prior to sensor failure,
excluding the last 0.5 second. An average aggregate rate is calculated both
with and without the newly failed sensor. The ratio of the two is used as a
multiplier for the rest of this layer's deposition. This removes any sudden jump
in the aggregate rate at the time of sensor failure. After this layer finishes, the
aggregate multiplier is removed. (See section
9.3 on page 9-2 for additional
information)
AGGREGATE MULTIPLIER
The parameter AGGREGATE MULTIPLIER (YES/NO) determines whether an
aggregate multiplier is calculated for this crystal's rate information if a crystal
fail occurs during deposition. This parameter is located on the Utility
Parameters display This multiplier is used only during the layer in which the
crystal failure occurs. After this layer is finished, the multiplier is cleared.
SENSOR WEIGHT. . . . . . . . . . . . . . 1.0 to 400.0 %
The Sensor Weight parameter is used to gauge the relative importance of an
individual sensor's is measured rate in calculating the weighted average,
“aggregate”, rate. This parameter is located on page 3 of the Material Set-Up
display.
SENSOR OPTION . . . . . . . . . . . . . . 0 to 4
The sensor option parameter on page 3 of the Material Set-Up display provides
for each sensor the ability to:
0) Turn off the use of this sensor
1) STOP if this is the last sensor to fail during deposition
2) Go to TIME POWER if this is the last sensor to fail during deposition
3) STOP when this sensor fails
4) Go to TIME POWER if this sensor fails.
NOTE: When using the double start or codeposition features a sensor may not
be used by two layers if both are in DEPOSIT at the same time. If
attempted, a “sensor conflict” error will occur and the instrument will
enter the STOP state. If one layer is in either a pre-Deposit or
post-Deposit state, and the other layer in DEPOSIT, the layer in
DEPOSIT has use of the sensor. Once both layers are started, a
sensor cannot be enabled if it is used by the other material.