INFICON IC/5 Thin Film Deposition Controller - Manual (Page 191)

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IC/5 Operating Manual
8.3 Source Parameters
The following parameters can be displayed for each of the source control channels.
DAC OUTPUT
This parameter designates which of the DAC outputs is to be used as a source
output. Values range from 0 to 6, with 0 indicating there is no DAC identified
with this particular source. Values 1 through 6 correspond to the 6 DAC outputs
on the back of the instrument.
VOLTAGE RANGE. . . . . . . . . . . . . . 0/1/2/3/4/5
This parameter selects the control voltage range for the source being edited.
Permissible values are 0, 1, 2, 3, 4 and 5 for maximum output voltages of 10,
5, 2.5, -10, -5, and -2.5 Volts respectively. The default value is 3, for a control
voltage output of 0 to -10 Volts.
SHUTTER OUTPUT. . . . . . . . . . . . . 0 to 38
This parameter designates which of the 38 outputs is to be used as the Source
Shutter relay. Values range from 0 through 38. 0 indicates that a Shutter is not
used and the values 1 through 38 correspond to the appropriate relay or open
collector type output. The default value is 0. If a value other than 0 is entered
the relay chosen as the Source Shutter relay is designated as such in the I/O
Map Display. When running a Layer containing the Source for which the Shutter
Output parameter is programmed, the logic condition is set to be true when the
Layer is in DEPOSIT or MANUAL. The condition remains true until the end of
DEPOSIT or until a STOP command is received.
SHUTTER OUTPUT TYPE . . . . . . . 0/1
This parameter designates the normal state of the relay contacts for the Shutter
Output relay. Permissible values are 0 and 1. 0 indicates an Normally Open
relay, 1 indicates a Normally Closed relay. The default value is 0.
NUMBER OF CRUCIBLES . . . . . . . 1,4,8,16,32,64
Refer to Section 3.6.2.1 for an example of programming Turret source crucible
selection. This parameter can be used to automatically index the turret position
when using a multiple pocket turret source. Permissible values are 1, 4, 8, 16,
32 and 64. The value selected denotes the number of pockets in the turret
source. The default value is 1 and indicates a single pocket source. If a 1 is
chosen, the parameters- Crucible Output, Crucible Output Type, Turret
Feedback and Turret Delay or Turret Input are removed from the Display. The
number of crucibles determines the number of relays needed for the crucible
output. As the relays are binary encoded (actual coding is binary - 1, with 000
representing position 1 and 111 representing position 8), 2 relays are needed
for 4 crucibles, 3 for 8, 4 for 16, 5 for 32 and 6 for 64.