4 error messages in utility set-up – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
9.4 Error Messages in Utility Set-Up
ILLEGAL DATE
The month or day entry is invalid. The month number must be 01-12; days
should be in the correct range for the month specified.
ILLEGAL INPUT - VALUE TOO LARGE
ILLEGAL INPUT - VALUE TO SMALL
Parameter entry is out of range. Allowable values will vary according to your
unit configuration or the parameter being defined. Press Clear to delete the
value and enter again.
ILLEGAL LOCK CODE
The correct lock code is necessary to unlock parameters.
ILLEGAL TIME
Time is invalid. The hour number must be in the 00 to 23 range; the minute
number must be in the 00 to 59 range.
LAYER UNDEFINED
The “Layer to Start” defined in Utility Set-Up must correspond to a defined layer
in the active process.
MUST ENTER OLD CODE
Utility Set-Up requires the old Program or I/O Lock Code to be entered before
updating to a new Program or I/O Lock Code.
NOW ENTER NEW CODE
After you verify the old Program or I/O Lock Code, this message will prompt you
to enter a new Lock Code.
PROCESS UNDEFINED
The Active Process defined in Utility Set-Up must correspond to a defined
Process. A defined Process is one which contains Layers.