INFICON IC/5 Thin Film Deposition Controller - Manual (Page 179)

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IC/5 Operating Manual
27 Timer tick, Sensor Status, Sensor thickness. Eight
bytes are returned for the sensor status. Each byte
represents the status of one sensor. A “G” indicates
the sensor reading is valid, an “F” indicates the
crystal is failed an “I” indicates the frequency
reading is invalid and an “x” indicates the sensor is
not selected.
tttbwwwwwww
þ
sxxx.xxx
þ
The sequence sxxx.xxx
þ
is repeated for each active sensor.
30 Timer tick, Sensor Status, Fundamental frequency,
Fundamental activity, individual sensor rate and
sensor thickness of active sensors. Eight bytes are
returned for the sensor status. Each byte represents
the status of one sensor. A “G” indicates the sensor
reading is valid, an “F” indicates the crystal is failed
an “I” indicates the frequency reading is invalid and
an “x” indicates the sensor is not selected.
tttbwwwwwwww
þ
sxxxxxxx.xx
þ
xxx
þ
sx.xxx
þ
sxxx.xxx
þ
The rate field may vary from sx.xxx
þ
to sxxxx.
þ
.
The sequence sxxxxxxx.xx
þ
xxx
þ
sx.xxx
þ
sxxx.xxx
þ
is repeated for each active
sensor.
31 Timer tick, Sensor Status, Average Sensor Rate.
Eight bytes are returned for the sensor status. Each
byte represents the status of one sensor. A “G”
indicates the sensor reading is valid, an “F”
indicates the crystal is failed an “I” indicates the
frequency reading is invalid and an “x” indicates the
sensor is not selected.
ttt
þ
wwwwwwww
þ
sxxxx
The rate field may vary from sx.xxx
þ
to sxxxx.
þ
.
NOTE:
Timer Tick is a counter that increments from 0 to 999 and repeats. Every 100
msec the IC/5 controller processes frequency information from each measurement board
and the Timer Tick counter is incremented. Keeping track of the counter value informs the
operator whether the currently returned frequency has been updated since the last
request for this information.
Table 7-20 Status Command SL
þ
layer_status_code
þ
Layer #
Code Channel Condition Response Format