INFICON IC/5 Thin Film Deposition Controller - Manual (Page 311)

Index - 3
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
source 4-5
channel configuration 8-2
control 3-34 , 8-1
slow 2-11
spattering 11-4
spreadsheet program 3-42
spurious shift 2-10
status code 7-28
switches 10-8
T
Technical Support 1-6
test mode 3-39
thickness shear mode 2-2
thickness twist mode 2-2
tooling 12-2
trend analysis 10-4
TTL input 10-14
Tune 2-15 , 12-11
turret
feedback 3-35
source 3-34
V
vacuum
gauge controller 10-9
system ready 10-15
valves 10-8
venting 10-19
voltage
input 11-8
W
windup 2-15
wire feed 4-12
X
XIU cable 11-10
Z
Z-match equation 2-5
Z-ratio 2-9 , 3-14 , 4-5 , 12-1 , 12-3