INFICON IC/5 Thin Film Deposition Controller - Manual (Page 229)

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IC/5 Operating Manual
delay between turning the electron beam gun filament voltage on and turning the
electron beam gun high voltage on. This delay allows the filament to warm up prior
to applying high voltage.
Figure 10-35 Statement 31
Statement 31 turns on the electron beam gun high voltage by activating the high
voltage interlock and electron beam gun high voltage relays after a 3 second delay.
Timer 13 is used in Statement 32 to indicate that Statement 31 has occurred. Timer
10 is canceled so that this statement can be true only once.
Figure 10-36 Statement 32
Statement 32 gives the IC/5 a START command to begin the Deposition process.
This statement will give the IC/5 another START command at the end of every
Layer to automatically sequence through every Layer in the Process. The “Not
Process End All” condition prevents an unwanted START command at the end of
the process. After the first START command, the IC/5 will no longer be in the
READY state and therefore Statements 30 and 31 can not be evaluated true a
second time. The portion of the condition statement that says, “Statement 31 and
Not Timer Expired 14" gives the first START command to the IC/5 (making sure it
was not in the READY state from a STOP/RESET sequence). The “Layer End All
and Not Process End All and Timer Expired 13" portion of the condition statement
gives subsequent START commands to the IC/5 as desired. Timer 13 is used to
effectively indicate that the “Statement 31 and Not Timer Expired 14" condition has
already been met and the first START command already given.
Figure 10-37 Statement 33
Statement 33 monitors for the End of Process condition. Again the dependence on
Timer 13 indicates that the End of Process condition occurred after the Process
was Started during this automatic pump down/deposition cycle and was not from
an earlier Process completion. Once the End of Process condition occurs the cool
down timer (Timer 11) is started. The PROCESS STARTED message is canceled
and the COOL-DOWN CYCLE message is displayed.