1 procedure setup, 1 procedure set-up – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
Enter CAL Thick values for material B (either automatically or manually)
Sens 1
Sens 2
Sens 3
Sens 4
CAL Thick
0.100 kA
0.050 kA
0.125 kA
0.500 kA
The percent Cross Talk for the Layer having Material B is:
[7]
If two Layers to be co-deposited have Cross Talk percentages greater than 100%,
the Process will STOP and the error message Cross Talk > 100% will be
displayed.
For the above example the calculated Cross Talk percentages are both below
100% and the two co-deposited Layers can be STARTed. If a sensor were to fail
during deposition, the IC/5 will calculate new Cross Talk percentages for the "new"
sensor configuration. For example, if Sensor 4 fails the new Cross Talk percentage
for Material A will be 5.3% which is acceptable, however, Material B's new Cross
Talk percentage will now be 120%. If this occurs the Process will STOP and the
error message Cross Talk > 100% will be displayed. This error condition must be
rectified before the Process can continue.
12.5.1 Procedure Set-Up
The Cross Talk Calibration feature will automatically calculate the Cal Thickness
values that appear on Material Page 3. These values in turn are used in
co-deposition to determine rates adjusted for the interference of one source with
the other. Calibration is done for each Material to be used in a Co-deposition. Note
that EVERY sensor used on BOTH Materials of a co-deposition MUST be
calibrated for EACH Material calibrated. Each material to be co-deposited is
calibrated separately. If a material is used in more than one co-deposition
application, for example, materials A and B co-deposited then materials A and C
co-deposited, Material A needs to be calibrated only once. A review of the
Procedural Notes is recommended, see
especially important if using Dual Sensor Heads.
To do a calibration, go to the Cross Talk Calibration display. This display is entered
from the Maintenance/Diagnostics Display by pressing the F5 function key. The
display is shown below in
. SETUP is shown in the lower left hand
corner of the display.
CAL Thick Sens 1 CAL Thick Sens 2
+
CAL Thick Sens 3 CAL Thick Sens 4
+
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100%
24.0%
=