INFICON IC/5 Thin Film Deposition Controller - Manual (Page 251)

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IC/5 Operating Manual
Calibration Thickness (CALThick) values must be determined for each sensor, for
each material used in the co-deposition, otherwise a co-deposition uncalibrated
message will be displayed. The Process cannot be STARTed until the Cal Thick
values are entered. These values may be manually entered on page 3 of the
Material Definition display or may be automatically calculated using the Cross Talk
Calibration series of displays. If Automatic Cross Talk Calibration is chosen the
CAL Thick values calculated will be displayed on page 3 of the Material Definition
display.
The CAL Thick values are then used to calculate the percent cross talk (Cross Talk
%) values shown on the Layer definition display. EVERY sensor used on BOTH
materials of a codeposition MUST be calibrated for each material.
Example: Materials A and B are to be co-deposited
Material A uses Sensors 1 and 2 which control the aggregate rate for Source 1.
Material B uses Sensors 3 and 4 which control the aggregate rate for Source 2.
Enter CAL Thick values for Material A (either automatically or manually):
Sens 1 Sens 2 Sens 3 Sens 4
CAL Thick 2.500 kA 2.200 kA 0.250 kA 1.000 kA
The percent Cross Talk for the Layer having Material A is:
[6]
CAL Thick Sens 3 CAL Thick Sens 4
+
CAL Thick Sens 1 CAL Thick Sens 2
+
------------------------------------------------------------------------------------------------
 
  100%
 26.6%
=