INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
STOP
This action is identical to pressing the STOP button on the front panel. (Refer
to
). The condition remains true until a RESET or
START command is received.
SOAK HOLD 1 (ON/OFF) #
If active (ON), the source # designated will pause execution and maintain Soak
Power 1 until Soak Hold 1 is turned OFF.
SOAK HOLD 2 (ON/OFF) #
If active (ON), the source # designated will pause execution and maintain Soak
Power 2 until Soak Hold 2 is turned OFF.
SWITCH CRYSTAL ###
This Action activates the Crystal Switch output for the sensor number indicated.
It sets the alternate crystal active when using a Dual sensor head. It indexes to
the next crystal position listed when using the Crystal Six or Rotary sensor.
This function is available only if a Dual, Crystal Six or Rotary sensor type is
chosen in Source/Sensor Set Up.
TIMER - HH:MM ## hh:mm
Sets the designated timer, counting down from the programmed time. Up to 20
timers may be set.
TIMER SECONDS ## sss.s
Sets the designated timer, counting down from the programmed time. Up to 20
timers may be set.
TRIGGER FINAL THICKNESS #
This action triggers Final Thickness and the Layer proceeds to the Feed Ramp
or Idle Ramp state. This will trigger on the primary layer if the number is 1, the
secondary channel if the number is 2, or both layers if the number is 0. This
Action is ignored if not in the Deposit state.
ZERO THICKNESS #
This Action is identical to selecting the ZERO THICKNESS panel in the
OPERATE display. The Action will zero the thickness accumulated on the
display for the Layer being deposited, and also will zero each of the sensor
thicknesses in use for this layer. The thickness will zero on the primary layer if
the number is 1, the secondary channel if the number is 2, or both layers if the
number is 0.
ZERO TIME
This Action will zero the Layer Deposit time for the Layer being deposited. If two
layers are in deposit simultaneously, the time will zero for both layers. If an
output is triggered on a Time Limit, the output will remain triggered even after
resetting the Layer Time.