2 process definition, Figure 5-2 – INFICON IC/5 Thin Film Deposition Controller User Manual

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Figure 5-2 Process Directory

5.2 Process Definition

Selecting the PROCESS function (key F5) in the Process Directory will take you to
a display that enables layer by layer specification (see

Figure 5-3

). Four adjacent

layers from left to right are visible at any time on a display page. The parameters
for each layer can extend ahead to a second page.

You move among and through the layers by using the cursor and function keys.
Parameters are entered with the numeric keypad. See

Table 5-1

.

Figure 5-3 Layer Definitions

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