2 process definition, Figure 5-2 – INFICON IC/5 Thin Film Deposition Controller User Manual
Page 112
Advertising
5 - 2
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
Figure 5-2 Process Directory
5.2 Process Definition
Selecting the PROCESS function (key F5) in the Process Directory will take you to
a display that enables layer by layer specification (see
). Four adjacent
layers from left to right are visible at any time on a display page. The parameters
for each layer can extend ahead to a second page.
You move among and through the layers by using the cursor and function keys.
Parameters are entered with the numeric keypad. See
Figure 5-3 Layer Definitions
Advertising