INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
Figure 3-14 Process State Diagram
1
Make sure the instrument is in READY. If not, press STOP then RESET.
2
Press START. Assuming there are no configuration problems, the first layer will
enter pre-deposition, and continue on through deposition and post-deposition.
(See
for detailed information about the states of a
layer.) If there are configuration problems, a message describing the problem
will be displayed, see
for Status and Error Message definitions.
3
When the first layer is complete, it will go to IDLE. Press START again to begin
the next layer. Repeat until the process is complete.
4
If at some point there is a need to interrupt or discontinue the process, press
STOP. This will close the sensor and source shutters, set the power to zero,
and freeze the display. The process can be restarted where it left off by
pressing START. (The pre-deposition phases will be repeated.) To completely
abandon the run, press RESET.
5
A critical error may occur while a process is running.
For example, a sensor fail on a single sensor with a single head crystal may
occur in pre-deposition. The IC/5 will automatically STOP if a critical error
occurs. See
section 13.1, Status and Error Messages, on page 13-1
for a list of
critical errors. Assuming the error has been remedied, the process can be
continued where it left off by pressing START. Pressing RESET will abandon
the run.