Appendix a material table, A.1 introduction, Appendix a – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
Appendix A
Material Table
A.1 Introduction
The following table represents the content of the instrument's material library. The
list is alphabetical by chemical formula.
CAUTION
Some of these materials are toxic. Please consult the
material safety data sheet and safety instructions before
use.
Remote Communications Responses and Commands use the code value to
represent a specific material. An * is used to indicate that a Z-ratio has not been
established for a certain material. A value of 1.000 is defaulted in these situations.
Table A-1 Material Table
Code
Formula
Density
Z-Ratio
Material Name
0
Ag
10.500
0.529
Silver
1
AgBr
6.470
1.180
Silver Bromide
2
AgCl
5.560
1.320
Silver Chloride
3
Al
2.700
1.080
Aluminum
4
Al
2
O
3
3.970
0.336
Aluminum Oxide
5
Al
4
C
3
2.360
*1.000
Aluminum Carbide
6
AIF
3
3.070
*1.000
Aluminum Fluoride
7
AIN
3.260
*1.000
Aluminum Nitride
8
AlSb
4.360
0.743
Aluminum Antimonide
9
As
5.730
0.966
Arsenic
10
As
2
Se
3
4.750
*1.000
Arsenic Selenide
11
Au
19.300
0.381
Gold
12
B
2.370
0.389
Boron
13
B
2
0
3
1.820
*1.000
Boron Oxide
14
B
4
C
2.370
*1.000
Boron Carbide
15
BN
1.860
*1.000
Boron Nitride
16
Ba
3.500
2.100
Barium