INFICON IC/5 Thin Film Deposition Controller - Manual (Page 190)

8 - 2
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
8.2 Source/Sensor Navigation
Once you are in the Source/Sensor Directory, you may select for configuration a
source channel or sensor pair by positioning the box cursor at the desired source
or sensor device and then pressing the F5 key (EDIT SOURCE/SENSOR). The
displays that follow are sensitive to the type of device selected and the presence
of optional hardware. Certain parameters may be displayed or inhibited depending
on the actual hardware configuration or the values entered. The parameters for
each channel or board are contained on a single display page. New values are
input from the front panel followed by pressing the Enter key. Values are cleared by
pressing the Clear key.
Figure 8-3 Source Parameter Editing
Table 8-1 Function Key Selection Choices for Source/Sensor Editing
Key Function Description
F6 SOURCE/SENSOR Select this key to return to the
SOURCE/SENSOR Directory and save the
current parameters.