INFICON IC/5 Thin Film Deposition Controller - Manual (Page 163)

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IC/5 Operating Manual
7.7.4.2 Update Process Parameters
For each command format the symbol
þ
represents a blank space.
The format is:
UP
þ
param#
þ
process#
þ
layer#
þ
value
This command changes the value of a process parameter for a specific process
and layer. Refer to
Chapter 5, Process Set-Up , for parameter value ranges.
NOTE: Rate, New Rate 1, New Rate 2 values can be input to the hundredth
position via communications. Deposition will be controlled to the hundredth
place, even though the front panel display and input only read to the tenth’s
place.
Table 7-13 Update Process Parameters
param# Process Parameter
0 Material Index
1 Aggregate Rate
2 Final Thickness
3 Thickness Limit
4 Time Limit
5 Co-Deposition Value is upper or lower case YES or NO
6 Ratio Control
7 Rate Watch Time
8 Rate Watch Accuracy
9 Crucible
10 New Rate 1
11 Start Ramp 1
12 Ramp Time 1
13 New Rate 2
14 Start Ramp 2
15 Ramp Time 2