INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
LAYER TO START . . . . . . . . . . . . . . 1 to 250
This selects the starting Layer from the sequence of Layers defined in the
Active Process. The upper limit to the range of values is determined by the
number of Layers defined for a given Process. Values range from 1 to a
maximum of 250. This value cannot be changed while executing a process.
STOP ON MAX POWER . . . . . . . . . YES/NO
This parameter provides a safety feature. If the parameter is set to YES and the
IC/5 is at maximum power for 5 continuous seconds, the IC/5 will enter the
STOP State. When in the STOP State, all source control voltage will be set to
zero. The default value is YES.
AGGREGATE MULTIPLIER . . . . . . (YES / NO)
For multiple sensor deposition control applications the Utility parameter
AGGREGATE MULTIPLIER (YES/NO) determines whether a multiplier is
calculated for a crystal’s rate information if this crystal fail occurs during
deposition. This multiplier is used only during the layer in which the crystal
failure occurs. After this layer is finished, the multiplier is cleared. Use of the
AGGREGATE MULTIPLIER affects calculation of the aggregate rate as
follows: (Assume all Sensor Weights are the same):
If the layer has not finished, the use of the AGGREGATE MULTIPLIER may be
turned back on and the previously calculated multiplier (in this case 1.25) will
continue to be used.
Table 9-2 Aggregate Multiplier Effect
Condition of the deposition
Sensor #1
Rate (Å)
Sensor #2
Rate (Å)
Sensor #3
Rate (Å)
Sensor #4
Rate (Å)
Aggregate
Rate (Å)
Aggregate
Multiplier
Start
10
10
10
10
10
1
Later in the Deposition
16
10
10
4
10
1
If #1 fails, notice what happens to
the aggregate rate if we do not
calculate an aggregate multiplier
Xtal Fail
10
10
4
8
1
An AGGREGATE MULTIPLIER is
calculated as the ratio of the
aggregate rate before the sensor
failure (using an average rate for the
failed sensor prior to failure) divided
by the aggregate rate after the
sensor failure (without the failed
sensor’s rate information).
With: 10
Without: 8
Ratio 1.25
Applying the multiplier to all future
aggregate rate results:
Xtal Fail
10
10
4
10
1.25
If during the deposition the use of
the aggregate multiplier is turned off,
the aggregate rate reverts back to:
Xtal Fail
10
10
4
8
not used