INFICON IC/5 Thin Film Deposition Controller - Manual (Page 234)

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IC/5 Operating Manual
NOTE: Do not allow water tubes to freeze. This may happen if the tubes pass through a
cryogenic shroud and the water flow is interrupted.
For best operation, maintain the input water temperature
at less than 30°C. In high temperature environments more heat may transfer to
the water through the water tubes than through the actual transducer. In extreme
cases it may be advantageous to use a radiation shield over the water tubes.
CAUTION
The performance of this instrument depends on the
careful installation of the chosen transducer. Improper
installation will cause problems with deposition
repeatability, crystal life and rate stability.
Table 11-1 Sensor Selection Table
Max. Bakeout
Temperature* Water Tube &
Size (Max. Envelope)
Coax Length Body & Holder IPN
CrystalSix Sensor 130 °C 3.5” dia. x 2.0” high
(8.9cm x 5.1cm) 30” (76 cm) 304 SS
(plate, holders &
material shield)** 750-446-G1
Standard Sensor 130 °C 1.063” x 1.33” x .69” high
(2.7cm x 3.4cm x 1.75cm) 30” (76 cm) 304 SS 750-211-G1
Standard Sensor
w/Shutter 130 °C 1.06” x 2.24” x .69”
(2.7cm x 5.7cm x 1.75cm) 30” (76 cm) 304 SS 750-211-G2
Sputtering Sensor 105 °C 1.36 x .47”
(3.45cm x 1.18cm) 30” (76 cm) Au-plated BeCu 007-031
Compact Sensor 130 °C 1.11” x 1.06” x 1.06”
(2.8cm x 2.7cm x2.7cm) 30” (76 cm) 304 SS 750-213-G1
Compact Sensor
w/Shutter 130 °C 2.08” x 1.62” x 1.83”
(5.3cm x 4.1cm x 4.6cm) 30” (76 cm) 304 SS 750-213-G2
UHV Bakeable
Sensor 450 °C 1.35” x 1.38” x .94”
(5.3cm x 4.1cm x 4.6cm) 12” (30.5cm)
20” (50.8cm)
30” (76.2cm) 304 SS 007-219
007-220
007-221
UHV Bakeable
Sensor w/Shutter 400 °C 1.46” x 1.37” x 1.21”
(3.7cm x 3.5cm x 3.1cm) 12” (30.5cm)
20” (50.8cm)
30” (76.2cm) 304 SS 750-012-G1
750-012-G2
750-012-G3
Shutter Assembly 400 °C two models available N/A 300-series SS 750-210-G1
750-005-G1
(Sputtering)
* For bake only; water flow is required for actual deposition monitoring. These temperatures are conservative maximum device
temperatures, limited by the properties of Teflon (PTFE) at higher temperatures. In usage, the water cooling allows operation in
environments that are significantly elevated, without deleterious affects.
** Aluminum body for heat transfer.