2 executing a process – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
5
Define layer/process.
To define layers and processes, the PROCESS displays are used. A process
is an ordered set of layers. Layers are entered in order on the PROCESS
display. Each layer consists of a material, chosen by number from the material
directory, final thickness, and rate. Additional information can be provided here
for special process features; these include thickness setpoint and time limit
triggers, RateWatcher, rate ramps, crucible selection and co-deposition. For a
detailed description of layer parameters see
.
6
Configure utility information.
The final step in defining a process is to program any process related
parameters on the UTILITY display. This includes which defined process to
execute, what layer to begin the process on (typically 1), and whether to STOP
on max power. It may also be desirable to modify the definition of the graphical
display and analog output. See
for a detailed description of utility
parameters.
3.4.2 Executing a Process
Once a process has been defined, it is ready to execute.
NOTE: Certain parameters cannot be changed while executing a process. The
IC/5 will not allow these parameters to be changed.
A Process is not being executed when the instrument is in the READY state, or
when the Last Layer is in the IDLE state (end of process). A Layer is not being
executed when the instrument is the READY, STOP, or IDLE state.
STOP freezes a process, the status information on the display is maintained
and the control voltage output is set to zero.
START, pressed once, will continue the process from the point at which it was
stopped.
RESET takes a stopped process back to the beginning of the process at the
designated “Layer to START.”
HINT: It may be desirable to execute a new process in TEST before doing an
actual deposition to check correct shutter operation, sequencing and limits.
The execution of a process is depicted in the following state diagram.