3 query utility parameters – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
7.7.3.3 Query Utility Parameters
For each command format the symbol
þ
represents a blank space.
The format is:
QU
þ
param#
This command returns a utility or all utility parameters. The parameters marked *
will return only a string of four X’s (i.e., XXXX).
Table 7-8 Query Utility Parameters
param# Utility
Parameter
0
Active Process
1
Run Number
2
Layer To Start
3
Stop on Max. Power
4
Aggregate Multiplier
5
Analog Display
6
Analog Scan Rate
7
Test On
8
Time Compressed
9
Program Lock Code*
10
Sensor-I/O Lock Code*
11
Floppy Disk Access Code*
12
System Time
13
System Date
14
Audio Feedback
15
Co-Deposition Display
16
Rate Smoothing
99
All Parameters; each separated by a space in the order
specified above.
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