3 query utility parameters – INFICON IC/5 Thin Film Deposition Controller User Manual

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IC/5 Operating Manual

7.7.3.3 Query Utility Parameters

For each command format the symbol

þ

represents a blank space.

The format is:

QU

þ

param#

This command returns a utility or all utility parameters. The parameters marked *
will return only a string of four X’s (i.e., XXXX).

Table 7-8 Query Utility Parameters

param# Utility

Parameter

0

Active Process

1

Run Number

2

Layer To Start

3

Stop on Max. Power

4

Aggregate Multiplier

5

Analog Display

6

Analog Scan Rate

7

Test On

8

Time Compressed

9

Program Lock Code*

10

Sensor-I/O Lock Code*

11

Floppy Disk Access Code*

12

System Time

13

System Date

14

Audio Feedback

15

Co-Deposition Display

16

Rate Smoothing

99

All Parameters; each separated by a space in the order
specified above.

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