2 outputs connected to i/o board 2 – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
This display is used to assign alphanumeric names to the various Outputs and
Inputs connected to I/O Board 2. This is to help the design and understanding of
the Logic Statements. For this example the TTL Inputs monitored are:
1
This input monitors the Deposition Pressure relay from the gauge.
2
The Evacuate Chamber input initiates the automatic process cycle. The logic
statements are designed so that the Alarm Answered input (if the Alarm is ON)
must be triggered prior to the Evacuate Chamber input in order for automatic
pump down to begin.
3
The Vent Chamber input is used to manually vent the vacuum chamber.
4
The Auto input indicates to the IC/5 that the Vacuum system is ready to be
controlled automatically by the IC/5.
5
This input monitors the atmospheric pressure relay from the gauge.
6
The Alarm Answered input indicates to the IC/5 that the Operator or Process
Engineer has responded to the Alarm.
7
The Connectors input is wired in series to the Board 1 and Board 2 relays to
indicate the output connectors for I/0 Boards 1 and 2 are properly connected.
See also the explanation for relay number 1 under I/0 Board 1.
8
This input is used to abort automatic processing.
10.3.2.2 Outputs Connected to I/O Board 2
1
The Board 2 relay is wired in series with the Board 1 relay and the Connectors
input to indicate the I/O Board connectors for boards 1 and 2 are properly
connected. See also the explanation for relay number 1 under I/O Board 1.
2
The Alarm relay is used to indicate the vacuum system requires attention by the
Operator or Process Engineer. This relay is wired to apply power to a visual (or
audible) alarm when closed.
3
The Ion Gauge relay is wired in series with the remote emission input on the
Ion Gauge. It is used to turn the Ion Gauge On and Off.
4
The Vent Valve relay turns the vent valve on and off.
5
The Crystal Shutter 1 relay controls the crystal shutter for sensor 1. This relay
is programmed in the Source/Sensors series of IC/5 displays.
6
The Source Shutter 1 relay controls the opening and closing of the shutter for
source 1. This relay is programmed in the Source/Sensors series of IC/5
displays.