5 logic statement example, Atement, see – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
6.5 Logic Statement Example
The logic statement capability of the IC/5 allows for automation of a thin film
process. For example, it is possible to run a multilayer process without manually
pressing START after each layer. One way to accomplish this is:
IF:
PROCESS END ALL AND LAYER END ALL
THEN:
START
The PROCESS END ALL assures that when the process ends, it will not
automatically repeat itself.
To enter this statement follow this procedure:
1
On the OPERATE screen, make sure the state is READY. If it is not, press
STOP, then press RESET.
2
Press the F6 key (PROGRAM), to go to the PROGRAM display.
3
From the PROGRAM display, press the F3 key (I/O), to get to the I/O display.
4
From the I/O display, press the F1 key (LOGIC STATEMENT DIRECTORY).
5
Place the cursor on any blank logic statement, using the up and down cursor
keys.
6
Press the F5 (EDIT LOGIC STATEMENT).
7
Press the F1 key (SELECT).
8
Cursor to LAYER END and press the F2 key (INSERT). The term “LAYER END
###” will appear after the “IF” in the upper left of the screen.
9
Cursor to PROCESS END, and press the F2 key (INSERT). “PROCESS END
### ccc LAYER END ###” will now appear after the “IF”.
10
Press the F6 key (LOGIC STATEMENT).
11
Cursor down to THEN and press the F1 key (SELECT).
12
Cursor down to START and press the F2 key (INSERT). Then press the F6 key
(LOGIC STATEMENT).
13
Cursor to “PROCESS END”, and press the F2 key (NEGATE). A bar will appear
above “PROCESS END”.
14
Cursor to “###” and press 0, E (Enter). The ### will be replaced by ALL.
15
The cursor should now be on “ccc”. Press the F1 key (SELECT) once to change
the ccc to AND.
16
Cursor to “###” and press 0, E (Enter). The ### will be replaced by ALL.
17
Press the F6 key (Logic Statement Directory w/Save), to return to the Logic
Directory. At this point the Logic Statement is entered into memory.
18
To return to the OPERATE display, press the F6 key three more times.
To run the multilayer process, press START once. As each layer ends, the IC/5 will
automatically issue another START, until the LAST LAYER has completed.