INFICON IC/5 Thin Film Deposition Controller User Manual
Page 266
13 - 2
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
CANNOT ROTATE DUAL
The rotate crystal function can only be performed on a CrystalSix sensor
head.
CANNOT TOGGLE INPUT
Output types can be toggled between Normally Open and Normally Closed.
An Input does not have a type function and cannot be toggled.
CO-DEP UNCALIBRATED
Indicates the two co-deposited materials do not have Calibration Thickness
values entered on the Material Set-Up displays and therefore the cross talk
calibration is uncalibrated. (Refer to
COMPLETE BUMP #
AutoTune displays the change in the power supply setting.
CROSS TALK > 100%
Cross Talk percentage values for each co-deposited Layer must be less than
100%. Refer to
for a more detailed description of
Cross Talk Calibration.
DATA LOG FAILURE
The instrument is attempting to output the datalog string faster than the
external device (e.g., computer or floppy disk) can accept the data. This
means the datalog information for this Layer is lost.
DEL LAST PROC FIRST
Delete Last Process first. The last layer of a process cannot be deleted unless
it is the last layer of the last defined process. The last layer of Process 1 can
never be deleted.
DELAY
The instrument is in a 5-second delay between Hold and Sample of
RateWatcher.
DISK IS FULL
There is not enough capacity on the floppy disk to save the requested
configuration file or datalog string.
DISK MEDIA ERROR
The instrument is unable to save or retrieve information on the floppy disk.
DISK WRITE PROTECTED
The Save requested cannot be performed when the floppy disk is physically
write protected.
DUPLICATE XTALS
The XL Position parameter must have unique positions for each of the 6
Crystal positions. For example, the sequence 135 is valid. The sequence 155
will return a Duplicate XTALS error message.