INFICON IC/5 Thin Film Deposition Controller - Manual (Page 109)

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IC/5 Operating Manual
4.4 Error Messages in Material Set-Up
BAD XTAL AND RUNNING
This message is displayed when the user attempts to turn on a sensor which
has a failed crystal while executing a process.
DUPLICATE XTALS
The XL Position parameter must have unique positions for each of the 6 crystal
positions. For example, the sequence 135 is valid. The sequence 155 will
return a DUPLICATE XTALS error message.
ILLEGAL INPUT - VALUE TOO LARGE
ILLEGAL INPUT - VALUE TOO SMALL
Parameter entry is out of range. Allowable values will vary according to your
unit configuration or the parameters being defined. Press Clear to delete the
value and enter again.
MUST USE 1 SENSOR
At least one sensor for each defined Material must have its Option parameter
non-zero.
OTHER DUAL IN USE
This error message is displayed when attempting to turn on a sensor that is
configured as a Dual sensor head on the Sensor Set-Up display. When two
sensors are configured as a Dual sensor type, only one of those sensors can
be turned on in the Material display. The sensor which is turned on is
considered the primary sensor of the Dual head.
SENSOR IN USE
An attempt is being made to turn on a sensor which is already in use for the
other of the co-deposited materials.
SET AS RECORDER OUT
The value you are attempting to enter has been previously defined as a
recorder output in either the Material Set-Up display or one of the Sensor
Set-Up displays.
SET AS SOURCE OUT
The value you are attempting to enter has been previously defined as a Source
DAC output in one of the Source Set-Up displays.
XTAL CANNOT EQUAL 0
A value in the XL Position parameter cannot be zero. For example, the
sequence 135 is valid. The sequence 105 is not valid.
XTAL GREATER THAN 6
A value in the XL Position parameter cannot be greater than six. For example,
the sequence 246 is valid. The sequence 247 is not valid.