INFICON IC/5 Thin Film Deposition Controller - Manual (Page 66)

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IC/5 Operating Manual
3 XTAL POSITIONS
This field is subdivided into three categories; current position (CURR), next
position (NEXT), and FAILED. Information is displayed in these fields only if the
sensor has a dual or CrystalSix sensor type.
For a dual sensor type the CURR field will show either the word ON or the word
OFF. ON indicates the active sensor of the dual sensor head. OFF indicates the
inactive (shuttered) sensor of the dual sensor head. For a dual sensor type the
NEXT and FAILED fields have no meaning.
For a CrystalSix sensor type the CURR field indicates the current position of
the CrystalSix sensor head. The NEXT field indicates the position to which the
CrystalSix sensor head will rotate upon pressing the CrystalSwitch function
key. The FAILED field indicates the CrystalSix sensor head positions containing
failed crystals.
4 Z TYPE
This field displays the Z-ratio being used for the given sensor. MATL indicates
the Z-ratio being used for thickness calculation is the value found in the Material
parameter Z-ratio. AUTO indicates the IC/5’s Auto Z feature is being used for
thickness calculations. Auto Z continually calculates the Z-ratio for the “as
deposited” film. If the IC/5 suddenly lost the ability to calculate Auto Z, AUTO
would change to either MATL or SENS. MATL has the same meaning as
described above, SENS indicates the last calculated Auto Z value (prior to
failure) is being used for thickness calculations for this sensor.
The IC/5 determines to use MATL or SENS depending on the frequency of the
fundamental. If the fundamental frequency closely matches the “last valid”
fundamental frequency prior to Auto Z failure, the IC/5 will use the SENS value.
Otherwise the IC/5 will use the MATL value.
5 Q (Crystal Quality value field)
This field displays the value currently accumulated in the Crystal Quality
counter when active. DLY indicates the Crystal Quality counter is not active.
The Crystal Quality counter will become active five seconds after entering
DEPOSIT and if the Crystal Quality parameter is non-zero. The function of the
Crystal Quality counter is described on
see page 4-8 .
6 S (Crystal Stability value field)
This field displays the value currently accumulated in the Crystal Stability
counter. The function of the Crystal Stability counter is described
on
see page 4-9 .