INFICON IC/5 Thin Film Deposition Controller - Manual (Page 118)

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START RAMP 2 . . . . . . . . . . . . . . . . 0.000 to 999.9 kÅ
This value determines the thickness at which to begin Rate Ramp 2. Values
range from 0.000 to 999.9 kÅ. The default value is 0. A value of zero disables
this feature. Start Ramp 2 thickness must be greater than Start Ramp 1
thickness. Also, Rate Ramp 2 can not be started until the completion of Rate
Ramp 1. If the thickness of Start Ramp 2 is exceeded while in Rate Ramp 1,
Rate Ramp 2 will begin immediately after
Rate Ramp 1.
RAMP TIME 2 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
This value is the time interval over which the aggregate rate is ramped linearly
from New Rate 1 to New Rate 2. Values range from 00:00 to 99:59
minutes:seconds. The default value is 00:00.
5.4 Error Messages in Process Set-Up
CANNOT DELETE CO-DEP
A layer being co-deposited cannot be deleted. Set the parameter co-deposition
to NO prior to deleting the layer.
CANNOT EMPTY PROCESS
The last layer of Process 1 cannot be deleted.
CANNOT INSERT CO-DEP
A layer cannot be inserted between two co-deposited layers. Set the
co-deposition parameter to NO prior to inserting a layer.
DEL LAST PROCESS FIRST
Delete last process first. The last layer of a process cannot be deleted unless
it is the last layer of the last defined process. The last layer of Process 1 can
never be deleted.
ILLEGAL INPUT - VALUE TOO LARGE
ILLEGAL INPUT - VALUE TOO SMALL
Parameter entry is out of range. Allowable values will vary according to your
unit configuration or the parameters being defined. Press Clear to delete the
value and enter again.
MATERIAL UNDEFINED
Material must be previously defined in the Material Directory.
MUST SET TAG(S)
A copy or delete operation cannot be done without first “tagging” the layer(s) to
be copied or deleted.