INFICON IC/5 Thin Film Deposition Controller - Manual (Page 170)

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IC/5 Operating Manual
7.7.5 STATUS Commands
Status commands return pertinent information based on a specific request made.
Commands are provided to determine global information which is system level or
channel information which is layer oriented. A status code is required for each
command. The command and the code are separated by a space. The command
variations include:
SG . . . . . . . . . . . . . . . . . . . . . . . . . . Status of system or instrument level
conditions.
SL. . . . . . . . . . . . . . . . . . . . . . . . . . . Status of an active layer.
For each command format the symbol
þ
represents a blank space.
The format is:
SG
þ
global_status_code
This command can be used to determine system or instrument level conditions. For
the Response Formats: x represents a number (if the value being returned does
not occupy the entire width, blanks are added to the left); s represents the sign
(only a negative sign is displayed, a blank is returned in this position if the value is
positive);
þ
represents a blank.
Table 7-19 Status Command SG
þ
global_status_code
Code# Global Condition Response Format
0 Active Process - Returns an ASCII value of 1
through 50 xx
1 Number of Layers In Progress - The first returned
value indicates the number of layers in progress,
returning an ASCII 0, 1, or 2. The second and third
values (if present) indicate the current layers in
progress. 0 or 1bx
or 2
þ
xx
þ
xx
2 Output Status - Returns 38 ASCII bytes, one per
output with a value of “0” or “1.” A “1” indicates the
output is active. xxxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxx
3 Input Status: Returns 28 ASCII bytes, one per input,
with a value of “0” or “1”. A “1” indicates the input is
active. xxxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxx
4 Logic Statements - Returns 100 ASCII bytes, one
per logic statement, depending on the condition of
the logic string. A “1” indicates the equation
evaluates to a true condition.
For command 4:
xxxxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxxx