INFICON IC/5 Thin Film Deposition Controller - Manual (Page 226)

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IC/5 Operating Manual
Statement 19 allows intervention to Abort automatic process control if desired. By
its dependence on Timer 1, the Abort input will be acted on only if the system is in
the automatic process control state. When evaluated true, Statement 19 places the
vacuum system into a specific condition. The High Vacuum Valve, Roughing Valve,
and Vent Valve relays will all be closed (the foreline valve will remain open if it is in
the open state at the time of the Abort input). Timer 2 is canceled to prevent
Statement 9, which turns on the Roughing Valve, from being evaluated true after
an Abort input The Alarm relay is activated to alert the operator that the system
requires attention.
Figure 10-24 Statement 20
Statement 19 does not modify the condition of the Foreline Valve. Statements 3, 20,
and 21 are used to open the Foreline Valve if the Foreline Valve was closed at the
time of the Abort input. The action taken is to set timer 4 and cancel timer 13. Timer
4 is the delay timer to prevent the Foreline Valve from opening too soon after
closing the Roughing valve. Timer 4 is canceled in Statement 21 which then allows
Statement 3 to be evaluated true and the Foreline Valve relay activated. Timer 13
is used in Statements 31, 32, 33, and 34 to indicate the four relays associated with
the electron beam gun high voltage are activated. Timer 13 is canceled here to
prevent further processing of the deposition cycle after receiving an Abort input.
Figure 10-25 Statement 21
Statement 21 works in conjunction with Statements 3 and 20. Timer 4, which is the
delay timer between closing the Roughing valve and opening the Foreline valve, is
no longer needed once the Roughing valve is closed.
Figure 10-26 Statement 22
Statement 22 cancels timers 3, 5, 6, 7, and 9 to prevent further processing of the
pump down cycle after receiving an Abort input. Timer 3 is monitored in Statement
10 and Timers 5 and 6 are used in Statement 12 to delay the opening of the High
Vacuum Valve after opening the Foreline Valve. Timer 7 is used in Statement 13 to
delay turning on the Ion Gauge emission after opening the High Vacuum Valve and
Timer 9 is used as a delay between Statements 10 and 11 to prevent the Foreline
Valve from opening too soon after closing the Roughing Valve.