INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
AGGREGATE RATE . . . . . . . . . . . . 0.0 to 999 Å/sec from front panel, 0.00 to 999
Å/sec via communications
This specifies the rate at which the deposition is to be controlled during the
DEPOSIT and Shutter Delay states. The Aggregate Rate is calculated based
on:
The rate information acquired by each sensor in use.
A sensor weighting factor that indicates the relative importance of each
sensor’s information
The sensor tooling factor that corrects for any relative difference in flux
distribution reaching the sensors.
The aggregate rate is calculated from a combination of the above information
into a weighted average. Values range from 0.00 to 999 Å/sec. The front panel
display is rounded up or down to the nearest 0.1Å. A value of 0.0 Å/sec allows
skipping of the deposit state (see
). The default value is
0.0 Å/sec.
FINAL THICKNESS . . . . . . . . . . . . . 0.000 to 999.9 kÅ
This is the thickness setting that triggers the end of the DEPOSIT state. A value
of 0.000 kÅ allows skipping of the deposit state (see
The Source Shutter and Crystal Shutter relays return to their normal states and
the Layer enters the Idle Ramp or the Feed Ramp state. Values range from
0.000 to 999.9 kÅ. The default value is 0.000 kÅ.
THICKNESS LIMIT . . . . . . . . . . . . . 0.0 to 999.9 kÅ
This sets the thickness at which the Thickness Limit is triggered. This thickness
begins to accumulate after entering the Deposit state. The state remains active
after reaching Thickness Limit until the beginning of the IDLE state. Values
range from 0.000 to 999.9 kÅ. The default value is 0.000 kÅ. See also
.
TIME LIMIT . . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
This is the deposition time at which the Time Limit is triggered. This time begins
to accumulate at the start of the Deposit state. The Time Limit, once triggered,
remains active until the start of the IDLE state. Values range from 00:00 to
99:59 minutes:seconds. The default value is 00:00. See also