2 trend analysis – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
TOOLING: MASTER & SENSOR
The tooling factor is now broken into two parts. The MASTER TOOLING
located on the first page of the Material Set-Up display, is used to scale the
aggregate rate and thickness to the substrate. SENSOR TOOLING is used to
account for the geometric tooling factor of each sensor. The Sensor Tooling
parameter is located on page 3 of the Material Set-Up display.
MASTER TOOLING. . . . . . . . . . . . . 10.0 to 400.0 %
The MASTER TOOLING is used as a global tooling factor. This parameter is
used to affect all the sensors' tooling together and calibrate the aggregate rate
and thickness to the thickness measured on the substrate.
SENSOR TOOLING. . . . . . . . . . . . . 10.0 to 400.0 %
SENSOR TOOLING is used to account for the geometric tooling factor of each
sensor. The default value is 100%. The calibration procedure for the Master
Tooling can also be applied to the SENSOR TOOLING parameter. Alternatively
each SENSOR's TOOLING factor can be adjusted relative to a particular
sensor.
10.2 Trend Analysis
Along with multiple sensor monitoring and control of the deposition process the
IC/5 allows rate and thickness information from individual quartz crystal sensors to
be output to the Digital-to-Analog (DAC) outputs. The function of each of the 6 DAC
outputs can be selected among the following functions: (refer to
, and
.)
Source Control voltage
Recorder Output for Sensor Rate or Sensor Thickness
Recorder Output for Aggregate Rate or Aggregate Thickness
Power Level
This enables mapping of an individual sensor's information, useful in monitoring
the change in source flux distribution during the deposition process.