INFICON IC/5 Thin Film Deposition Controller - Manual (Page 183)

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7.7.7 Negative Response Error Codes
An error code in the form of a single ASCII character is returned when a command
results in an error. The error code is followed by a NAK character.
7.8 Sample INFICON Messages and
Host Programs
The following illustrate examples of typical message streams and host programs.
The message streams are shown with decimal byte values representing ASCII
codes or numeric sums. The programs are in BASIC and were implemented on an
AT class PC.
7.8.1 Sample INFICON Messages
Serial Communications Forms (RS-232C)
Command Message - No Checksum
Description- Query state of Stop On Max Power
Command- QU 3
Message Form- (command)<ACK>
Message Stream- 81 85 32 51 06
Command Message - With Checksum
Description- Update Maximum power of Material 20 to 60 %
Command- UM 13 20 60
Message Form- <STX>(count)(command)(checksum)
Message Stream- 02 00 11 85 77 32 49 51 32 50 48 32 54 48 46
Table 7-23 Negative Response Error Codes
error code Command Error
A Illegal Command
B Illegal Value
C Illegal ID
D Illegal Command Format
E No Data To Retrieve
F Cannot Change Value Now
G Bad Checksum
O Data Overrun Error