INFICON IC/5 Thin Film Deposition Controller - Manual (Page 62)

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IC/5 Operating Manual
Figure 3-6 Operate Display
Operate Display Description
1 Layer Currently In Process
2 Layer Timer
3 Material Being Deposited
4 Source Number In Use
5 Sensor Number(s) In Use
6 State of Layer
7 Function Key Definitions
8 Message Area
9 Date and Time
10 Run Number
11 Process Timer
12 Process Being Executed
13 Graphical Display of Rate Deviation or Power
14 Layer Thickness
15 Aggregate Rate