INFICON IC/5 Thin Film Deposition Controller - Manual (Page 215)

10 - 9
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
10.3.1.3 Solenoid Valves
Source Shutter
An electro-pneumatically operated valve which controls the source shutter.
Sensor Shutter
An electro-pneumatically operated valve which controls the sensor shutter.
10.3.1.4 Electron Beam Gun Power Supply
This provides power to the electron beam gun with the ability to remotely
enable the filament voltage and 1O KV electron beam acceleration voltage. The
supply used in this example has 4 inputs to remotely control these voltages.
These inputs are Filament On, Filament Off, Remote High Voltage On, Remote
High Voltage Off. In this example, each input is wired in series with an IC/5
relay. In this example these four relays are numbered 5, 6, 7, and 8 and are
named E-GUN-HI-V, HI-V-INTER, FILAMENT, and FIL-INTER.
10.3.1.5 Vacuum Gauges and Controllers
Two vacuum gauge controllers are used. These 2 gauges provide 3 pressure
sensors, 2 of which are Pirani gauges and the third is an ION gauge. One of
the Pirani gauges is used to sense the foreline pressure, the second is used to
sense the chamber pressure and the Ion Gauge is used to sense the chamber
pressure when under high vacuum. The Ion Gauge controller has a remote
emission on input which is wired in series to the ION-GAUGE relay in the IC/5.
The Gauge controllers have 4 relays programmed to monitor the vacuum
system pressure and are wired to be Normally Open. One of these relays is
programmed to close when the Crossover pressure is reached and provides
the contact closure for the CROS - PR - OK input. A second relay is
programmed to close when the foreline pressure is below a specified set point
and provides the contact closure for the FORE - PR - OK input. The third relay
is programmed to close when the chamber is at atmospheric pressure and
provides the contact closure for the CHM-AT-ATM input. The fourth relay is
programmed to close when the Ion Gauge reaches the desired deposition
pressure and provides contact closure for the DEPO-PR-OK input.
The Gauge controllers also have status relays to indicate whether the gauge is
operating normally. These status relays are wired to be Normally Closed. The
status relay of the first gauge controller is wired in series to the status relay of
the second gauge controller which in turn is wired in series to the GAUGES
input on the IC/5.