4 co-deposition – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
3.4.4 Co-deposition
On the IC/5 it is possible to execute two layers simultaneously. A co-deposition is
defined on the Layer Definition display. A YES is entered for the co-deposition
parameter of the first layer to be co-deposited. This layer is referred to as the
primary layer. The primary and secondary layers must both be defined before the
YES is entered for the co-deposition parameter of the primary layer. In
co-deposition, when the primary layer reaches final thickness, the secondary layer
will also leave deposition. However, if the secondary layer reaches final thickness
first, the primary layer will continue until reaching its programmed final thickness.
There are two other parameters associated with co-deposition. The first is ratio
control. This controls the secondary layer’s rate at a percentage of the primary
layer’s desired rate. The second is cross-sensitivity, which compensates for
interference between the two depositions. See Sections
and
for details on programming these parameters.
If two layers are programmed for co-deposition, pressing START once will begin
both layers.
NOTE: It is also possible to run two layers at the same time by pressing START
twice, but ratio control, cross-sensitivity and automatic completion of the
secondary channel will not be active.