INFICON IC/5 Thin Film Deposition Controller - Manual (Page 253)

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IC/5 Operating Manual
Figure 12-1 Cross Talk Calibration
12.5.1.1 Cross Talk Calibrate Parameters
MATERIAL INDEX. . . . . . . . . . . . . . 1 to 24
This parameter is used to select the Material (from the Material Directory) to be
calibrated. Values range from 1 to 24. The default value is 1. The name of the
material is displayed to the right of the selection.
DESIRED RATE. . . . . . . . . . . . . . . . 0.1 to 999 A/s
This parameter determines the aggregate rate at which to control the
deposition source while a Cross Talk Calibration is being done. This aggregate
rate is comprised of the sensors chosen to be ON in the Material Set-Up
display. Values range from 0.1 to 999 A/s. The default value is 10 A/s. It is
recommended this rate be identical to the aggregate rate desired during
deposition.
MAXIMUM POWER . . . . . . . . . . . . . 0.0 to 99.9
This parameter is identical in function to the Maximum Power parameter found
in Material Set-Up. The default value is 90.0 °/a.
CALIBRATE. . . . . . . . . . . . . . . . . . . Yes/No
This entry selects which sensors are to be calibrated.
NOTE: Every Sensor used for both of the co-deposited materials must be
turned on (set to YES) during calibration of each Material in order for
the Cross Talk Correction to work properly. The aggregate rate,
however, is determined only from those sensors turned on in the
Material Set-Up display for each Material.
Any sensor for which there is a crystal fail will default to NO.